STN EN 62047-12
| Name: | STN EN 62047-12 |
| Validity: | Valid |
| Number of pages: | 32 |
| Language: |
EN
|
| Paper: | 17,20€ |
| Electronic version |
a) Only read (without ability to print and copy)
15,48€ b) Without ability to print, with ability to copy (printscreen) 17,20€ c) With ability to print and copy (printscreen) 22,36€ |
| Slovak title | Polovodičové súčiastky. Elektromechanické mikrosúčiastky. Časť 12: Skúšobné metódy tenkovrstvových materiálov na namáhanie ohýbaním s využitím rezonančnej vibrácie štruktúr MEMS |
| English title | |
| Release Date: | 01. 03. 2012 |
| Date of withdrawal: | |
| ICS: | 31.080.99 |
| Sorting character/National clasification code | 35 8792 |
| Level of incorporation: | idt IEC 62047-12:2011, idt EN 62047-12:2011 |
| Official Journal | 02/12 |
| Amendments | |
| Replaced by: | |
| Repleces: | |
| Note in Official Journal: | |
| Subject of the standard: |