STN EN 62047-21
Name: | STN EN 62047-21 |
Validity: | Valid |
Number of pages: | 15 |
Language: |
EN
|
Paper: | 14,10€ |
Electronic version |
a) Only read (without ability to print and copy)
12,69€ b) Without ability to print, with ability to copy (printscreen) 14,10€ c) With ability to print and copy (printscreen) 18,33€ |
Slovak title | Polovodičové súčiastky. Elektromechanické mikrosúčiastky. Časť 21: Skúšobná metóda na stanovenie Poissonovho čísla tenkovrstvových materiálov MEMS |
English title | Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials |
Release Date: | 01. 02. 2015 |
Date of withdrawal: | |
ICS: | 31.080.99 |
Sorting character/National clasification code | 35 8792 |
Level of incorporation: | idt IEC 62047-21:2014, idt EN 62047-21:2014 |
Official Journal | 01/15 |
Amendments | |
Replaced by: | |
Repleces: | |
Note in Official Journal: | |
Subject of the standard: |