STN EN 62047-17
| Name: | STN EN 62047-17 |
| Validity: | Valid |
| Number of pages: | 57 |
| Language: |
EN
|
| Paper: | 21,40€ |
| Electronic version |
a) Only read (without ability to print and copy)
19,26€ b) Without ability to print, with ability to copy (printscreen) 21,40€ c) With ability to print and copy (printscreen) 27,82€ |
| Slovak title | Polovodičové súčiastky. Elektromechanické mikrosúčiastky. Časť 17: Meranie mechanických vlastností tenkých vrstiev skúšobnou metódou vydutím |
| English title | Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films |
| Release Date: | 01. 12. 2015 |
| Date of withdrawal: | |
| ICS: | 31.080.99 |
| Sorting character/National clasification code | 35 8792 |
| Level of incorporation: | idt EN 62047-17:2015, idt IEC 62047-17:2015 |
| Official Journal | 11/15 |
| Amendments | |
| Replaced by: | |
| Repleces: | |
| Note in Official Journal: | |
| Subject of the standard: |