STN EN 62047-26
| Name: | STN EN 62047-26 |
| Validity: | Valid |
| Number of pages: | 35 |
| Language: |
EN
|
| Paper: | 17,20€ |
| Electronic version |
a) Only read (without ability to print and copy)
15,48€ b) Without ability to print, with ability to copy (printscreen) 17,20€ c) With ability to print and copy (printscreen) 22,36€ |
| Slovak title | Polovodičové súčiastky. Elektromechanické mikrosúčiastky. Časť 26: Opis a metódy merania mikrodrážkových a ihlicových štruktúr |
| English title | Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures |
| Release Date: | 01. 10. 2016 |
| Date of withdrawal: | |
| ICS: | 31.080.99 |
| Sorting character/National clasification code | 35 8792 |
| Level of incorporation: | idt EN 62047-26:2016, idt IEC 62047-26:2016 |
| Official Journal | 09/16 |
| Amendments | |
| Replaced by: | |
| Repleces: | |
| Note in Official Journal: | |
| Subject of the standard: | |
| Preview: | Náhľad normy (PDF) |