STN EN ISO 14644-10
Name: | STN EN ISO 14644-10 |
Validity: | Valid |
Number of pages: | 40 |
Language: |
EN
|
Paper: | 18,90€ |
Electronic version |
a) Only read (without ability to print and copy)
17,01€ b) Without ability to print, with ability to copy (printscreen) 18,90€ c) With ability to print and copy (printscreen) 24,57€ |
Slovak title | Čisté priestory a príslušné riadené prostredie. Časť 10: Posudzovanie čistoty povrchu z hľadiska chemickej kontaminácie (ISO 14644-10: 2022) |
English title | Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022) |
Release Date: | 01. 09. 2022 |
Date of withdrawal: | |
ICS: | 13.040.35 |
Sorting character/National clasification code | 12 5301 |
Level of incorporation: | idt EN ISO 14644-10:2022, idt ISO 14644-10:2022 |
Official Journal | 08/22 |
Amendments | |
Replaced by: | |
Repleces: | STN EN ISO 14644-10:2013-08 (12 5301) |
Note in Official Journal: | |
Subject of the standard: | This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. |
Preview: | Náhľad normy (PDF) |