STN EN ISO 23216
| Name: | STN EN ISO 23216 |
| Validity: | Valid |
| Number of pages: | 20 |
| Language: |
EN
|
| Paper: | 14,10€ |
| Electronic version |
a) Only read (without ability to print and copy)
12,69€ b) Without ability to print, with ability to copy (printscreen) 14,10€ c) With ability to print and copy (printscreen) 18,33€ |
| Slovak title | Karbónové filmy. Stanovenie optických vlastností amorfných karbónových filmov spektroskopickou elipsometriou (ISO 23216: 2021) |
| English title | Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021) |
| Release Date: | 01. 02. 2023 |
| Date of withdrawal: | |
| ICS: | 25.220.99 |
| Sorting character/National clasification code | 03 8571 |
| Level of incorporation: | idt ISO 23216:2021, idt EN ISO 23216:2022 |
| Official Journal | 01/23 |
| Amendments | |
| Replaced by: | |
| Repleces: | |
| Note in Official Journal: | |
| Subject of the standard: | This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes. |
| Preview: | Náhľad normy (PDF) |