STN EN ISO 23131
| Name: | STN EN ISO 23131 |
| Validity: | Valid |
| Number of pages: | 28 |
| Language: |
EN
|
| Paper: | 14,10€ |
| Electronic version |
a) Only read (without ability to print and copy)
12,69€ b) Without ability to print, with ability to copy (printscreen) 14,10€ c) With ability to print and copy (printscreen) 18,33€ |
| Slovak title | Elipsometria. Princípy (ISO 23131: 2021) |
| English title | Ellipsometry - Principles (ISO 23131:2021) |
| Release Date: | 01. 02. 2023 |
| Date of withdrawal: | |
| ICS: | 17.020 |
| Sorting character/National clasification code | 03 8570 |
| Level of incorporation: | idt ISO 23131:2021, idt EN ISO 23131:2022 |
| Official Journal | 01/23 |
| Amendments | |
| Replaced by: | |
| Repleces: | |
| Note in Official Journal: | |
| Subject of the standard: | This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3. |
| Preview: | Náhľad normy (PDF) |